Chamber半導體意思

"Chamber" in the context of semiconductor manufacturing refers to a chamber or a part of a chamber where the semiconductor wafer is processed. Semiconductor manufacturing involves several processes such as deposition, etching, annealing, and more, which are performed in specialized chambers within the equipment used for these processes.

For example, a deposition chamber is used for depositing thin films of materials onto the wafer. An etching chamber is used for removing materials from the wafer to create patterns and features. An annealing chamber is used for annealing the wafer, which is a process of heating and cooling the wafer to reduce stress and improve the crystal structure of the semiconductor material.

The term "chamber" can also refer to the entire processing environment where the semiconductor wafers are loaded and unloaded for various manufacturing steps. These chambers are typically part of larger systems, such as cluster tools, where multiple chambers are connected to allow for continuous processing without breaking the vacuum or exposing the wafers to the atmosphere.